THERMAL PROCESSING – Furnaces, Elements, Quartz

Screen Shot 2021-03-28 at 8.13.42 PM.png

THEORIS 302 / FLOURIS 201 Vertical Oxidation Furnace THEORIS 302 / FLOURIS 201 Vertical Oxidation Furnace for 200mm and 300mm. Applicable process Dry ox, Wet ox, DCE ox, Silicon oxynitride ox, & Anneal.  

Screen Shot 2021-04-03 at 4.39.42 PM.png
Screen Shot 2021-04-03 at 4.40.01 PM.png

THEORIS 302 / FLOURIS 201 Vertical Low Pressure Chemical Vapor Deposition System.

Applicable process - Silicon nitride, silicon dioxide film dep, poly, amorphous silicon

Screen Shot 2021-04-03 at 4.45.03 PM.png
Screen Shot 2021-04-03 at 4.45.10 PM.png

HORIS D8572A horizontal furnace  -diffusion / oxidation system.  Applicable process Atmospheric pressure (micro-positive pressure) closed-tube dry ox, wet ox, hydrogen -oxygen synthesis oxidation, annealing / Propulsion, alloy.

Screen Shot 2021-04-03 at 4.51.52 PM.png
Screen Shot 2021-04-03 at 4.56.04 PM.png
Screen Shot 2021-04-03 at 4.57.31 PM.png

HORIS L6371 Multifunction Horizontal LPCVD. Applicable process:

Silicon dioxide ( LTO , TEOS ), silicon nitride ( Si 3 N 4 (including low stress)), polycrystalline silicon ( LP-POLY ), phosphorous silicon glass ( BSG ), borophosphosilicate glass (BPSG) , doped polysilicon, Graphene, carbon nanotubes and other thin film.

FURNACE ELEMENTS - world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers. Temperatures up to 1350C.

DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as: Tokyo Electron (TEL), Hitachi Kokusai, Axcelis, Thermco, Bruce (BTI),Silicon Valley Group (SVG) 

If you are looking for a diffusion heater that is not listed, please contact us.

Screen%20Shot%202021-04-03%20at%205.08_e
Screen%20Shot%202021-04-03%20at%205.07_e
Screen Shot 2021-04-03 at 5.24.41 PM.png

To play, press and hold the enter key. To stop, release the enter key.

press to zoom
press to zoom
press to zoom
press to zoom
press to zoom
press to zoom
press to zoom
press to zoom

CONTACT US

Morgan Hill, California 95037

Thanks for submitting!

  • Black LinkedIn Icon
  • Black Facebook Icon
  • Black Twitter Icon
  • Black Google+ Icon
  • Black Instagram Icon