top of page



KLA Service/Support/Parts
Experts – 20+ years of experience

F5, FX5, UV1050,1080,1250 & 1280.
Spectra FX 100, 200 & CD, Surfscan 6000 series

Located in San Jose, California.
Parts – new and repairs. No restocking fee if used to trouble shoot.
Service as needed, or customizable contracts.

Screen Shot 2021-03-31 at 7.13.21 PM.png

SIE Equipments

Sensible Industrial Engineering, Inc


Sizes: 300/200 or 200/150mm, Single, or Dual, 4 Stations and/or

300mm DFIMS are available to modify.
Properties: SEMI standard wafer thickness and geometry.
​Material: Silicon wafers that scatter 10% of incident light.

Screen Shot 2021-03-29 at 6.43.18 PM.png

Product Description
The Surfscan SP1 DLS  unpatterned wafer inspection system captures yield-limiting defects down to
50nm at high throughput, to accelerate yield learning rates across all process modules at the
0.13µm design rule and below. With complete defectivity and haze information provided in a single
scan, the Surfscan SP1 DLS  delivers the information required for wafer and integrated circuit
manufacturers to rapidly develop and ramp their processes for advanced device production.

Hitachi CD Sem Equipment and Laser

Parts and Domestic Maintenance services for the following Hitachi series

1. Hi-SEM: TM1000, TM3000/30, S3000N, S3400N, S3700N, S3500, SU1510, SU3500,
S2700 2. FeSEM: S4500, S4000, S4700, S4300, S4800, S5000, S-5500, SU-8000, SU-8200

Periodic maintenance packages and have a team of experienced engineers to help end users to

conduct HYPM and PM

Screen Shot 2021-03-29 at 7.55.16 PM.png


Morgan Hill, California 95037

Thanks for submitting!

  • Black LinkedIn Icon
  • Black Facebook Icon
  • Black Twitter Icon
  • Black Google+ Icon
  • Black Instagram Icon
bottom of page