Experts – 20+ years of experience
F5, FX5, UV1050,1080,1250 & 1280.
Spectra FX 100, 200 & CD, Surfscan 6000 series
Located in San Jose, California.
Parts – new and repairs. No restocking fee if used to trouble shoot.
Service as needed, or customizable contracts.
Sensible Industrial Engineering, Inc
KLA-TENCOR SURFSCAN SP1/TBI Experts
Sizes: 300/200 or 200/150mm, Single, or Dual, 4 Stations and/or
300mm DFIMS are available to modify.
Properties: SEMI standard wafer thickness and geometry.
Material: Silicon wafers that scatter 10% of incident light.
The Surfscan SP1 DLS unpatterned wafer inspection system captures yield-limiting defects down to
50nm at high throughput, to accelerate yield learning rates across all process modules at the
0.13µm design rule and below. With complete defectivity and haze information provided in a single
scan, the Surfscan SP1 DLS delivers the information required for wafer and integrated circuit
manufacturers to rapidly develop and ramp their processes for advanced device production.
Hitachi CD Sem Equipment and Laser
Parts and Domestic Maintenance services for the following Hitachi series
1. Hi-SEM: TM1000, TM3000/30, S3000N, S3400N, S3700N, S3500, SU1510, SU3500,
S2700 2. FeSEM: S4500, S4000, S4700, S4300, S4800, S5000, S-5500, SU-8000, SU-8200
Periodic maintenance packages and have a team of experienced engineers to help end users to
conduct HYPM and PM