Legacy & Refurbished Equipment

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Ardeo Systems supports legacy furnaces – BTI Apogee, BDF41 BDF 200 and Semitherm VTP.  We provide spare parts and specialize in repairs of the 7355 series of DDC controllers, NSK drivers, servo controller boards, Apogee robot rebuilds, BDF boat loader repairs, & MCU power supply kits. Retrofits and refurbished BTI furnaces available. EDU repairs, MCU PCBoards, CPU, RAM/ROM, Utility Board, ServoBoards, Intempos Temp Module, 7900 and 8100 Gas Modules

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NSK X-Axis linear slide bearings have a finite lifetime.  Failure mode is the breakdown of ball bearing retainers on the 6 slide bearing blocks which leads to rough movement and particle generation.  The OEM parts are no longer available from NSK.  Precision grade replacement parts from NSK are used to rebuild X axis motor.  Mechanical and electrical alignment is performed to return motor to OEM condition.

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The Oriental Motors (Vexta) used in the V, VR and R axis are obsolete. We have engineered a solution using the current version of an Oriental Motor in conjunction with a 3rd party encoder. 

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SEZ We offer a variety of new parts, spareparts, refurbishment and enhancements, as well as full tool refurbishments for SEZ/LAM wet etch tools. We can still support he first generations (RST100/101/102/103 –SP200/201/203/223 –wet master –304 –323 –4200 –4300 and DV Tools).

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LAM equipment and support specialist.Providing refurbished equipment, enhancements, field service, spare parts and repairs. Repairs include PCB’s,ESC, Power supplies, RF Generators, RF Matches, Chillers and Valves.

LAM 9600, TCP METAL ETCH SYSTEM
LAM 9600, TCP METAL ETCH SYSTEM
LAM 4420 LAM 4420 OXIDE ETCH SYSTEM
ALLIANCE A6

REPAIRS

RFG1250 Generators Refurbish, Repair and Exchange

LRC Harmonic Arm Driver Refurbish, Repair and Exchange 853-012123-001. 853-012123-004 . 853-012175-001 853-012175-002 . 853-012175-003 . 853-012175-004 853-012200-002 . 853-012200-004 . 853-012261-004

Valve—throttle Refurbish, Repair and Exchange All Throttle valves for LAM Tools

Reduced Height & Standard Arm Housing Refurbish, Repair and Exchange 0853-012100-003 · 853-012100-004 · 853-021563-001 853-021819-001 · 853-021819-002 · 853-022100-001 853-022100-003 · 853-022100-004

LRC Gate Assembly Refurbish, Repair and Exchange 853-012200-002 . 853-012200-004 . 853-012661-001 853-140013-001 . 853-012350-001 . 853-140013-001 853-012875-002

Lifter Spinner Refurbish, Repair and Exchange 5-001 853-012525-001 · 853-012525-002 · 853-012525-002

Susceptor — Applied Refurbish, Repair and Exchange

Wafer Lifter—Applied Refurbish, Repair and Exchange

Edge Detector Refurbish, Repair and Exchange 853-012500-001 · 853-012500-002 · 853-012500-003

Indexer-lam Refurbish, Repair and Exchange 853-004073-001 . 853 012600-001 . 853-012600-002 853-012600-101 . 853-012600-102

Indexer—gasonics Refurbish, Repair and Exchange 03A96-016-03 · A96-016-04

AMAT RF Hybrid Match 0010-12090

WVDS Controller Refurbish, Repair and Exchange 853-033887-001

AMAT RF Match High Efficiency Refurbish, Repair and Exchange 0010-30686

RF Match Etch Refurbish, Repair and Exchange 0010-04137 · 0010-09416 · 0010-09417 0010-09490 · 0010-36162

CVD RF Match Refurbish, Repair and Exchange 0010-09750

LRC DSQ RF Match Refurbish, Repair and Exchange 853-025735-001 • 853-025735-004 • 853-025735-008

LRC Upper Match (T-Match) Refurbish, Repair and Exchange 853-032294-001 · 853-032294-002 · 853-032294-003 853-032294-004

LoFat Match Refurbish, Repair and Exchange 853-025903-001 · 853-025903-002

LRC Mini Match Refurbish, Repair and Exchange 853-015130-002 · 853-015130-003 · 853-015130-004 853-015130-006 · 853-015130-102 · 853-015130-103 853-015130-202 · 853-015130-204 · 853-015130-205 853-330951-001 · 853-330951-021 · 853-025083-001 853-025083-002 · 853-025083-003 · 853-025083-004 853-025083-022

A/E Generator Refurbish, Repair and Exchange

Lam 2080 Refurbish, Repair and Exchange

Phase Mag Detector Refurbish, Repair and Exchange 853-000577-001

M&W dual Refurbish, Repair and Exchange

HX 75 Refurbish, Repair and Exchange

ESC Power Supply Refurbish, Repair and Exchange 810-017086-670 • 810-017086-007 • 810-017086-671 853-025054-018 • 853-330473-001 • 810-017003-005 810-017086-018 • 810-370182-001 • 853-025054-116 853-330478-001 • 810-017056-018 • 810-017086-670 853-025054-010 • 853-025054-701

ENI Generators Refurbish, Repair and Exchange OEM-12B-02 OEM12B-03 . 0EW2B-06

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Semitool

Supplier of choice for legacy wet spray and plating tools. We can provide spare parts, repairs and upgrades as well as refurbished tools.

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COATER / DEVELOPER PLATFORMS

Turnkey Solutions

  • We take in the Hardware & Process specifications, and design a system for a tool to be refurbished that meet the customers requirement. We work together from:

    • Specifications setting

    • Tool configuration

    • Tool sourcing (if non-existent)

    • Complete refurb and overhaul

    • Installation and Process approval

    • Warranty on the system and function

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CONTACT US

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